|

˜ʣUSA Federal Standard209E1992꣩
ȼe |
(um) |
|
0.1 |
0.2 |
0.3 |
0.5 |
5.0 |
1 |
35.0 |
7.50 |
3.00 |
1.00 |
NA |
10 |
350 |
75.0 |
30.0 |
10.0 |
NA |
100 |
NA |
750 |
300 |
100 |
NA |
1000 |
NA |
NA |
NA |
1000 |
7.0 |
10000 |
NA |
NA |
NA |
10000 |
70.3 |
100000 |
NA |
NA |
NA |
100000 |
700 | |
λm/ft3 |
ЇˎƷaң^Ŀ՚❍Ș˜
ȼe |
mS/ƽ |
S |
|
0.5um |
5um |
ξ/ |
/.30min |
100 |
3500 |
0 |
5 |
1 |
10000 |
350,000 |
2,000 |
100 |
3 |
100000 |
3,500,000 |
20,000 |
500 |
10 |
300000 |
10,500,000 |
61,800 |
NA |
15 | |
ˎƷO199981հlʩ |
0.5umĸȵȼƌձ
/M30.5um |
ISO 14644-1(1999) |
US 209E(1992) |
US 209D(1988) |
EEC GGMP(1989) |
FRANCE AFNOR(1981) |
GERMANY VDI 2083(1990) |
JAPAN JAOA(1989) |
1 |
- |
- |
- |
- |
- |
- |
- |
3.5 |
2 |
- |
- |
- |
- |
0 |
2 |
10.0 |
- |
M1 |
- |
- |
- |
- |
- |
35.3 |
3 |
M1.5 |
1 |
- |
- |
1 |
3 |
100 |
- |
M2 |
- |
- |
- |
- |
- |
353 |
4 |
M2.5 |
10 |
- |
- |
2 |
4 |
1,000 |
- |
M3 |
- |
- |
- |
- |
- |
3,530 |
5 |
M3.5 |
100 |
A+B |
4,000 |
3 |
5 |
10,000 |
- |
M4 |
- |
- |
- |
- |
- |
35,300 |
6 |
M4.5 |
1,000 |
1,000 |
- |
4 |
6 |
100,000 |
- |
M5 |
- |
- |
- |
- |
- |
353,000 |
7 |
M5.5 |
10,000 |
C |
400,000 |
5 |
7 |
1,000,000 |
- |
M6 |
- |
- |
- |
- |
- |
3,530,000 |
8 |
M6.5 |
100,000 |
D |
4,000,000 |
6 |
8 |
10,000,000 |
- |
M7 |
- |
- |
- |
- |
- | |
Ҽ^՚БҸӝȵȼ
՚❍ȵȼ(N) |
ڻڱֵ(pc/m3) |
|
0.1um |
0.2um |
0.3um |
0.5um |
1um |
5um |
1 |
10 |
2 |
|
|
|
|
2 |
100 |
24 |
10 |
4 |
|
|
3 |
1000 |
237 |
102 |
35 |
8 |
|
4 |
10000 |
2370 |
1020 |
352 |
83 |
|
5 |
100000 |
23700 |
10200 |
3520 |
832 |
29 |
6 |
1000000 |
237000 |
102000 |
35200 |
8320 |
293 |
7 |
|
|
|
352000 |
83200 |
2930 |
8 |
|
|
|
3520000 |
832000 |
29300 |
9 |
|
|
|
35200000 |
8320000 |
293000 | |
Ҙ˜GB50073-2001 |
|
|